E.B.Priyanka, S.Thangavel



Advanced Enhancement Model of Bionics Fish Cilia MEMS Vector Hydrophone-Systematic Analysis Review

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A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezo resistive reasonable position was obtained through finite element analysis by ANSYS and the structure was formed by MEMS processes including lithography, ion implantation, PECVD and etching etc. The standing wave barrel results show that the lowest sensitivity of the hydrophone is -200 dB and reach up to -160 dB (in which the voltage amplification factor is 300). It has a good frequency response characteristics in 25 Hz 1500 Hz band. Directivity tests displayed that the hydrophone has a good “8”-shaped directivity, in which the resolution is not less than 30 dB, and asymmetry of the maximum axial sensitivity value is less than 1.2 dB and this hydrophone has a good directional pattern in form of "8"-shapes. The experiment results show that the receiving sensitivity of the hydrophone is 197.7 dB (0 dB ¼ 1V/mPa). The novel hydrophone not only possesses satisfactory directional pattern as well as miniature structure, but also has good low-frequency characteristics, and satisfies the requirements for low-frequency acoustic measurement


Bionics, Hydrophone, MEMS


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Cite this paper

E.B.Priyanka, S.Thangavel. (2018) Advanced Enhancement Model of Bionics Fish Cilia MEMS Vector Hydrophone-Systematic Analysis Review. International Journal of Applied Physics, 3, 14-19


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